Surface Profilometry

Stylus Profilometry

Device

Dektak 150 / Veeco

Expected Result

The method reveals surface roughness and waviness, texture, and even wear patterns. The latter might be crucial for industries that rely on material integrity, such as aerospace and electronics. Accurate surface topography mapping ensures components meet stringent quality standards on large sample areas.

Method

The diamond stylus records fine height differences in a surface topography. The lateral size and vertical range that can be scanned by stylus profilometry is much larger compared to AFM.

Case Study

A customer develops micro- and nanostructures on substrates for applications like flexible electronics or microfluidics. Profilometry reveals the surface topographies, ensuring the integrity and functionality of these structures on solid or flexible substrates.

Stylus Profilometer Dektak 150 / Veeco

Stylus surface profilometer with diamond tip for measuring topography and roughness on large sample areas.
Stylus surface profilometer with diamond tip for measuring topography and roughness on large sample areas.
Surface Profilometer, credit JOANNEUM RESEARCH

Specifications

  • Sample size: up to 4 inch
  • Z range: 1 mm
  • Stylus force: 1 to 15 mg
  • Scan length: max. 55 mm
  • Stylus radius: 50 nm to 25 µm (12.5 µm in house)
  • Max. 120,000 data points per measurement
  • Video optics with zoom, variable field of view 0.67 to 4.29 mm
  • Below 1 nm step height repeatability

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